SCSe124
Cleaning System
Categories
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§ Single-sided Sub-Micron Manual Cleaners.
§ Cleans Wafers, Photomasks, Lenses, and Small Flat Panel Displays.
§ Large Installed Base
Multiple Process Recipes
§ Up to Ten (10) Inch Diameter Substrate Compatibility
§ Adjustable Arm Speed and Travel
Positions in Recipe
Positions in Recipe
§ Radially Exhausted
Chamber for Maximum Laminar Flow
Chamber for Maximum Laminar Flow
§ Stand-alone Polypropylene Cabinet
§ Microprocessor Control Capable of Retaining Ten Programs in Memory
§ Built in Safety Interlocks
§ Push Button Lid Open/Close
§ Touch Screen Graphic User Interface (GUI) with Ease of
Programming & Security Lockouts and On-Screen Error Reporting
Programming & Security Lockouts and On-Screen Error Reporting