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Manufacturers

There are 4 manufacturers.

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  4 Dimensions

  (1) Four-Point Probe System

  Four Dimensions' Four Point Probe systems measure the sheet    resistance / resistivity / thickness of a wide range of  materials. We   offer a wide range of models, options, and probe  heads to suit your   materials', measurement, and budget needs. We  can also tailor systems   to your special  requirements.    All our four-point probe systems (except computerless models) can be    modified to measure the pn junction leakage of USJ (range 1E-9 to 1E-2    S/cm2).

  (2) Mercury Probe CV-IV maping System

  Four Dimensions' Mercury Probe Systems use the liquid metal  Mercury   to form temporary non damaging electrical contacts on  numerous   materials. The instantaneous contact formed on  semiconducting materials   can be of MOS, MIS, or Schottky barrier  type. This permits various   electrical characterizations of for  example silicon and compound   semiconductors without the need of  metal deposition processes.

  Our unique Mercury probe design features outstanding safety and contact area repeatability. It  permits us to offer the widest range of contact areas and probe head configurations.   The mercury contacts can be a dot (3E-5 cm2 to 0.8 cm2)  or a dot and   one or more rings, as well as a linear array of four  probes. Thus our   systems can probe on a variety of substrates  including insulators, as   well as SOI structures.

  Our automated Mercury probe systems come with unique  capacitance and   current meters that can perform C-V, I-V, Q-V, as  well as V-t   measurements. These measurements allow a wide range  of sample   characterization:

  • Oxide integrity monitoring
  • Doping density profiling, low dose ion implantation          monitoring, and USJ doping profiling
  • Carrier lifetime extraction
  • Resistivity measurements of semi-insulating materials
  • Pseudo MOST characterization of SOI structures (B          systems)
  • Ferroelectric sample investigations
  • Poly Silicon characterization

  See the application chart for more details.

  Square waves are used to determine the quasistatic, deep  pulse, and   high frequency capacitance. Square wave probing is  insensitive to   series resistance and eliminates the need of phase  adjustments required   in conventional capacitance measurements  using sinusoidal signals. The   versatility of the system can be  enhanced by accessories for external probing and by attaching  external meters such as Agilent   4285A, or Keithley 590 C-V  meters, or Keithley 2410 high voltage   source.

  Our Windows based CVmap software serves the needs of both, research and development as well as  production line, environments.   top

  (3) Mercury Four Point Probe System

  Based on decades of experience with needle four point probes  and   C-V, I-V Mercury probing stations, Four Dimensions developed  a Mercury   four point probe (patent pending). The liquid metal  Mercury is used to   form temporary electrical contacts at four  terminals. These probes   cause no damage to the sample and permit  no contact pressure probing.

  The system meets the requirements for ultra shallow junction    probing, but may well be applied to other ultra thin films found  for   example in hard disks and flat panels.

  Advantages of Mercury Probes:

  • Non destructive probing
  • No pressure probing
  • Highly repeatable contact area

  Basic features:

  • Safe design principle
  • Refreshed mercury before each contact insures clean          contact
  • Clean and safe Mercury handling
  • Mercury reservoir replacement only twice a year

  top

  (4) Mercury Probe: Integrated Four Point and CV-IV mapping System

  Four Dimensions' Mercury Probe Systems use the liquid metal Mercury to form temporary non damaging electrical contacts on numerous materials. The instantaneous contact formed on semiconducting materials can be of MOS, MIS, or Schottky barrier type. This permits various electrical characterizations of for example silicon and compound semiconductors without the need of metal deposition processes.

  Our unique Mercury probe design features outstanding safety and contact area repeatability. It permits us to offer the widest range of contact areas and probe head configurations. The mercury contacts can be a dot (3E-5 cm2 to 0.8 cm2) or a dot and one or more rings, as well as a linear array of four probes. Thus our systems can probe on a variety of substrates including insulators, as well as SOI structures.

  Our automated Mercury probe systems come with unique capacitance and current meters that can perform C-V, I-V, Q-V, as well as V-t measurements. These measurements allow a wide range of sample characterization:

  • Oxide integrity monitoring
  • Doping density profiling, low dose ion implantation monitoring, and USJ doping profiling
  • Carrier lifetime extraction
  • Resistivity measurements of semi-insulating materials
  • Pseudo MOST characterization of SOI structures (B systems)
  • Ferroelectric sample investigations
  • Poly Silicon characterization

  See the application chart for more details.

  Square waves are used to determine the quasistatic, deep pulse, and high frequency capacitance. Square wave probing is insensitive to series resistance and eliminates the need of phase adjustments required in conventional capacitance measurements using sinusoidal signals. The versatility of the system can be enhanced by accessories for external probing and by attaching external meters such as Agilent 4285A, or Keithley 590 C-V meters, or Keithley 2410 high voltage source.

  Our Windows based CVmap software serves the needs of both, research and development as well as production line, environments. top

   

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  2 products view products
  
  
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  Allwin21

  High-tech equipment, services and technical support in Semiconductor industry,MEMS, Biomedical, Nanotechnology,Solar,LEDs etc.. Located in Santa Clara, the heart of Silicon Valley, Allwin21 has been providing unique technical support, high quality equipment and fast supplied spare parts worldwide. We have maintained a global presence that has grown and expanded. into the major high-tech  manufacturing areas of the world.

  Allwin21 Corp. provide Rapid Thermal Process, Plasma Asher Stripper Descum, Plasma Etch, Reactive ion etching (RIE), PECVD, Inductively coupled plasma (ICP), Metrology & Inspection, Electrical Test and PCM Software, Wafer Probers, Sputtering and Evaporator System

  2 products view products
  
  
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  E+H Metrology

  Wafer geometry and resistivity measurement

  5 products view products
  
  
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  Ultra T

   Cleaning Systems -

  Cleaning systems for a variety of substrate sizes, up to twenty three inches (23") on the diagonal/diameter that provide for uniform application of High Pressure and/or Megasonic de-ionized H2O dispensed. Plumbed for submicron application, having all Teflon lines and stainless or Teflon valves. Optional brushes, with surfactant dispense are available, as are low pressure dispenses of surfactant and/or chemistries for one step cleaning. Rapid acceleration and excellent exhaust along with N2 dry assist provide for short and thorough drying cycle. To thoroughly eliminate potential electrostatic buildup an N2 ionizer unit and antistatic materials are available.

   

  Automated Cassette-to-Cassette Double Sided Systems  >>

  Manual Load Double Sided Systems  >>

  Manual Load Single Sided Systems>>

   

  - H₂O Reionizers -

  Systems for re-ionizing of de-ionized H2O with CO2. Re-ionization eliminates deleterious effects caused, if left untreated, the two most significant of which are localized surface ionization and primary and secondary damage associated with static discharge.

   

  - Spin Coaters -

  Systems for coating substrates with liquid films (i.e. photoresists, polyamides, spin-on-glass). Specially configured for coating uniformity and low consumption of liquid films.

   

  - Developers -

  Systems for developing positive photoresist liquid film coating on substrates. Provides uniform control of develop parameters and provides controlled termination of develop cycle and efficient rinse.

  2 products view products