E+H MetrologyThere are 5 products.

E+H Metrology
A wide variaty of standard and customized metrology products for the Semiconductor and Solar industry.

Metrology Modules
Many of the E+H standard MX metrology tool series can be used on robot sorters, such as:

MX 10x series (Thickness)
MX 20x series (Geometry/Flattness: Thickness, Warp, Stress)
MX 60x series (Thickness, Resistivity)
MX 70x series (Thickness, Warp, Waviness, Roughness)